Development of advanced lithography technology (I): extension of the existing equipment path

Digitimes
Mar 27, 2023, 2:00 am243 pts
Lithography technology is a mainstream means used by the semiconductor industry to define fine patterns. At present, the most advanced technology is EUV (extreme ultraviolet), and the latest mass production equipment is ASML's TWINSCAN NXE: 3600D. The light source used is 13.5nm EUV light produced by carbon…

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