China's self-developed immersive DUV system remains years away despite milestone in dry DUV technology

Digitimes
By Jingyue HsiaoSep 19, 2024, 2:06 am191 ptsTrendingTop
China recently achieved a milestone with its indigenous lithography system, which is capable of producing chips at nodes smaller than 65nm. However, the development of an immersive DUV system remains several years away.

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