China ships first NIL lithography tool as 300-plus firms mobilize to rival EUV tech

Digitimes
By Levi LiAug 5, 2025, 10:59 pm438 ptsTop
Amid tightening US export controls on EUV lithography systems and related technologies, China's chip equipment sector has made a breakthrough. On August 1, Pulin Technology (Hangzhou) shipped its first domestically developed semiconductor-grade step-and-repeat nanoimprint lithography (NIL) tool, the PL-SR…

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