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Sep 8, 2026, 11:02 am121 pts
The Register
ASML and chipmaking giant TSMC have launched an industry-wide push toward 12-inch photomasks, saying the larger format could lower costs and overcome some limitations of high-NA EUV lithography. Dutch firm ASML, the only commercial supplier of EUV lithography systems, says it and TSMC have established a…
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