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Russia outlines EUV litho chipmaking tool roadmap through 2037 — country eyes replacing DUV with EUV, but plans appear unrealistic

  • Tom's Hardware faviconTom's Hardware

    Sep 27, 2025, 11:12 am437 ptsTop
    photo of Russia outlines EUV litho chipmaking tool roadmap through 2037 — country eyes replacing DUV with EUV, but plans appear… imageThe Russian Academy of Sciences has unveiled a 2026–2037 roadmap for domestic 11.2 nm EUV lithography tools that reject ASML's architecture in favor of xenon plasma, Ru/Be mirrors, and solid-state lasers, aiming for simplified, tin-free, cost-effective alternatives.
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