Gigaphoton debuts neon recycling system with claimed 50% recovery rate

Tom's Hardware
By Jon MartindaleOct 6, 2026, 9:20 am110 pts
Japanese semiconductor lithography tool maker Gigaphoton has developed a novel neon gas recycling system named hTGM for its argon fluoride (ArF) excimer lasers. The method has demonstrated a 50% recycling rate, with hopes that it can be improved dramatically with adjusted configurations, Business Wire reports.…

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